1. Design and materials characterization issues in microstructure technology (mst)
Authors : Ajay Kumar Rakesh
Pages : 162-167
DOI : http://dx.doi.org/10.21172/1.71.022
Keywords : MST,MEMS,Microstructure technology; Scaling; Microfabrication; Material selection; Mechanical Properties. Abstract :Microstructure technology (MST) has become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MSTT combines mechanical and electrical function in devices at very small scales. Examples include pressure sensors,accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fuidic applications.The status of Microstructure technology is reviewed with particular emphasis on materials issues therein. The materials issues in MST are divided into three categories, the MST material set, microfabrication processes, and material characterization and design. Of these areas,here particular emphasis is given on characterization and design in MST. A discussion on the future of MST specially emphasis on characterization is given.
Citing this Journal Article :Ajay Kumar Rakesh, "Design and materials characterization issues in microstructure technology (mst)", Volume 7 Issue 1 - May 2016, 162-167
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